Discharge Characteristics Induced By Self-Ezcited by Radio Frequency During Plasma Ion Implantation of Cylindrical Bore
It is very critical to produce steady plasma of high density inside the tube for purpose of ion implantation of the interior surface. In this paper, a new approach has been put forward with the stainless steel cylindrical bore acting itself as a plasma source to induce plasma within the tube. The tube is connected to radio-frequency (rf) power and also to high-voltage power supply and a central electrode in the tube is connected to ground. Steady discharge and plasma with high density may be induced in the tube powered by RF system. Langmuir probe has been used to diagnose the plasma characteristics under different experimental parameters including pressure, rf power, and length of tube, etc. The results show that the non-uniformity of plasma density is lower than 15％ in the range from +75mm to -75 mm. With increasing RF power, the plasma density increases and there exits a proper RF power to lead to a better uniformity of plasma density. The working pressure has a slight influence on magnitude and uniformity of plasma density. The tube length has a slight effect on the uniformity in the middle region.
Cylindrical bore Self-ezcited rf Plasma characteristics
GONG Chun-zhi TIAN Xiu-bo ZHU Zong-tao YANG Shi-qin
Institute of Plasma Surface Engineering & Equipment, State Key Lab.of Advanced Welding Production & Technology, School of Materials Science & Engineering, Harbin Institute of Technology, 150001 Harbin, China
国际会议
沈阳
英文
358-361
2009-08-24（万方平台首次上网日期，不代表论文的发表时间）