Study by Means of IR and XPS of AlzOy Barrier Films On PET Substrate Prepared by PVD
Used the radio frequency power in the PET basis, take pure Al as the target, the oxygen to respond the gas, the high pure argon for the sputtering plasma, prepared high-resistance AlxOy/PET packing thin film, analyzed with the infrared spectrum (IR) indicated that the aluminum oxide IR spectrums peak value, the intensity and the band width and so on orderly change with the passed over oxygen quantity. The XPS research discovered that in the O-Al-O expansion vibration frequency and the coating the oxygen and the aluminum values relations are: The Al-O expansion vibration peaks wave number is higher, in AlxOy the oxygen atom content is higher. Simultaneously surveys the thin film the impediment demonstration: AlxOy the membrane y value bigger impediment performance is better.
AlzOy/PET PVD IR XPS
LIN Jing SUN Zhi-hui LIU Zhuang
Harbin Engineering University, Harbin 154001, China
国际会议
沈阳
英文
372-375
2009-08-24（万方平台首次上网日期，不代表论文的发表时间）