MEMS-based Ultrasonic Flow Measurement

摘要：

Over the past 10 years, Ultrasonic Flow Metering(USFM) has evolved from niche flow measurement solution to the mainstream. Despite this growth and development, this paper analyzes the technical limitations, such as: impedance mismatching, timing accuracy, flow profile correction, signal strength, accuracy etc. Microelectromechanical systems(MEMS) have been considered as a technical field that has a huge growth in research and capability in recent years. Consequently there are many researches on MEMS for USFM. The paper presents a summary of ultrasonic MEMS transducers suitable for USFM and the potential applications for MEMS based USFM.

关键词： Ultrasonic Flow Metering Ultrasonic MEMS transducers MEMS-based USFM Current Limitations Potential Applications

作者: ZHANG Jin WANG Boxiong LUO Xiuzhi FAN Shangchun ZHANG Lixin

作者单位: State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision In State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision In School of Instrument Science and Opto-electronics Engineering, Beihang University,Key Laboratory of Tangshan Huizhong Instrumentation Co., Ltd.

会议类型: 国际会议

会议名称: 第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)

会议地点: 重庆

会议语种:英文

页码: 1227-1232

在线出版日期: 2009-08-01（万方平台首次上网日期，不代表论文的发表时间）