Design and Fabrication of Integrated High Sensitivity Displacement Sensor Based on Micro Ring Resonator
A novel displacement sensor based on micro ring resonator is described. In this paper, the structures of cantilever and ring resonator are studied systematically by FEM (Finite Element Method) and BPM (beam propagation method) simulations. In our design, the length, width and height of cantilever are 400μm, 50μm, 60μm, the width and height of waveguide are 1μm and 0.6μm, and the gap of bus waveguide and ring resonator is about 0.05μm, respectively. Further more, the fabricate method of coupling gap is introduced in detail. FIB (Focused Ion Beam) is used to etch the coupling gap second time accurately, and the whole manufacturing process is also presented.
Displacement Sensor Ring Resonator FIB
XUE Chenyang LIU Xin YAN Shubin JI Zhe
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education Department of Electronic Science and technology, North university of China, Taiyuan, Shanxi, China, 030051
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
1802-1806
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）