Encapsulation research of a MEMS bionic hydrophone

摘要：

A MEMS sensor used to receive an acoustical signal in water needs solving many problems, for example, endure high water pressure, sound transmission and insulation, etc. Based on a theoretical model and practical application in engineering, a sound transmission cap configuration made use of polyurethanes is designed, which is used to encase the MEMS sensor in castor oil. The endure pressure experimental results and receive sound signal in water experimental results show the sound transmission cap configuration have the merits in enduring water pressure, sound transmission and insulation etc. the sound transmission cap configuration lays a good foundation for the MEMS hydrophone application in engineering.

关键词： MEMS hydrophone

作者: Guojun Zhang Jijun Xiong Chen yang Xue Wendong Zhang

作者单位: National Key Laboratory For Electronic Measurement Technology, North University of China

会议类型: 国际会议

会议名称: 第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)

会议地点: 重庆

会议语种:英文

页码: 1822-1825

在线出版日期: 2009-08-01（万方平台首次上网日期，不代表论文的发表时间）