会议专题

A study of static electromechanical characteristics of grating light modulator

The energy method is applied in analyzing the spring constant of cantilever beam. The static electromechanical model of GLM is established and analyzed. According to the static electromechanical model and the actual designed parameters, the spring constant of GLM is 13.1765N/m, and the operating voltage and the pull-in voltage of GLM are respectively 8.23V and 8.81V in theory. Finally, the experimental results indicate that the operating voltage is 7.8V, the pull-in voltage is 8.5V, and the response frequency is about 7kHz.

MOEMS GLM electromechanical model spring constant driving voltage

JIN Zhu WEN Zhiyu ZHANG Zhihai ZHANG Jie HUANG Shanglian

National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, China Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, Chongqing University, China,400044

国际会议

第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)

重庆

英文

1826-1830

2009-08-01(万方平台首次上网日期,不代表论文的发表时间)