Effect of the Depth of Actuating Electrodes on the Pull-in Voltage of A MEMS Switch
In the paper the governing differential equation for the elastic curve of a beam,which is made of two different materials, is used. Based on the equation, the pull-in voltage of a MEMS switch with the depth of the actuating electrode considered is analyzed for different depths of the actuating electrodes, different lengths of actuating electrodes, different initial gaps,different lengths and different depths of the beam. It is seen from the results that over a region of depth of the actuating electrodes the pull-in voltage is proportional to the ratio of the depth of the actuating electrodes to the depth of the beam, and the linear relationship is outwardly independent of the length and the depth of the beam, the initial gap, and the length of the actuating electrodes.
Cao Tianjie
Transportation Engineering College,Civil Aviation University of China,Tianjin 300300
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
1847-1850
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）