Vertical Scanning Interferometry Based on White-light Interference Reconstructs MEMS Device Surface Profile

摘要：

Vertical scanning interferometry based on white-light interference is a typical measurement method for the standard step microstructure. Contrasting with other algorithms, vertical scanning interferometry has higher resolution, faster operation speed and higher accuracy. In this paper, a series of interferograms with intensity information for standard step microstructures are obtained from Micro System Analyzer. The surface profile is reconstructed. The results of measurement coincide with the real step height of the standard device microstructures.

关键词： Vertical scanning interferometry white-light interference intensity zero optical path difference

作者: LIU Yi NIU Kangkang LI ming CHOU Xiujian XUE Chenyang ZHANG wendong

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education Department of Electronic Science and technology, North university of China, Taiyuan, Shanxi, China, 030051

会议类型: 国际会议

会议名称: 第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)

会议地点: 重庆

会议语种:英文

页码: 1859-1862

在线出版日期: 2009-08-01（万方平台首次上网日期，不代表论文的发表时间）