Digital MEMS Inclinometer

摘要：

A novel inclinometer was presented in this paper. The inclinometer provided with some features such as: minuture volume, low weight, high reliability and simple structure, easy to design and fabricate. The fabrication technology, structure and design of the inclinometer were presented. The interface circiut was designed and presented. The angle ingormation can be detected, preamplifiered, processed and displayed. The inclinometer has a mesurement range of 360°(full turnover).

关键词： MEMS inclinometer chip microcomputer digital display

作者: DUAN Junping LIU Jun XUE Chengyang ZHANG Binzhen

作者单位: Department of Electronic Science and technology, North University of China,Taiyuan, Shanxi, 030051,CHN

会议类型: 国际会议

会议名称: 第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)

会议地点: 重庆

会议语种:英文

页码: 1863-1865

在线出版日期: 2009-08-01（万方平台首次上网日期，不代表论文的发表时间）