Research and Development on X-ray Micro-CT System for MEMS
MEMS devices have become more and more popular in many fields such as aeronautics, astronautics and medicine. It is always a big challenge to inspect the internal structure and drawbacks of MEMS devices nondestructively. Industrial computed tomography is a powerful non-destructive testing tool. But its spatial resolution is limited and can not meet the requirements. So we have developed a micro computed tomography for the CT imaging and inspection of MEMS devices. This system consists of a micro-focus X-ray generator and a-si flat panel detector. It adopts the generation III scan mode to execute the CT imaging scan. Some key engineering techniques have been researched and the corresponding processing methods have been proposed such as high-resolution reconstruction algorithm, ring artifacts correction method and noise suppression method. Finally the CT imaging experiments of the JIMA sample and a MEMS device shows the validity of this system.
MEMS micro computed tomography multi-dimensional coupling micro- capacitance measurement
FU Jian LI Bin Zhou Zhenggan Wei Dongbo ZHOU Xingyu
School of Mechanical Engineering and Automation, Beijing Univ.of Aero.&Astro., Beijing, China, 10019 School of Mechanical Engineering and Automation, Beijing Univ.of Aero.&Astro., Beijing, China, 10019
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
1947-1950
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）