Hybrid integrated capacitance accelerometer
In this paper, micro differential capacitance detecting circuit and signal conditioning circuit of capacitive accelerometer are presented, The final output of the circuit is voltage signal that is proportion to the capacitance change of the accelerometer. For the purpose of decreasing the sensor volume and improving the detection precision, the thick film hybrid technology has been used to fabricate the signal detecting and conditioning circuit on 96％ alumina substrate. Furthermore, the circuit and micro silicon capacitance accelerometer are integrated in one package. The sensor volume reduced to a quarter of the discrete circuit. The testing results show the accuracy of the sensor increases by one order and the electromagnetic compatibility is improved.
Accelerometer Capacitance Accelerometer Micro Capacitance Detection Thick-film Hybrid Integration
Ma Xi-hong Liu Jun Guo Hu-gang
National Key Laboratory of the Electronic Measurement Technology Key Laboratory of Instrumentation S National Key Laboratory of the Electronic Measurement Technology Key Laboratory of Instrumentation S
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
2026-2029
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）