Coazial transmission line outer conductor inner diameter automatic measurement system
Deep hole diameter measurement questions are difficult at home and abroad, the current measurement method has the disadvantages of slow measuring speed and low precision. As the aperture decreasing, the measurement would be more difficult and the accuracy would be reduced. According to the above conditions, the noncontact measurement method based on the capacitance sensor is given out. The method can effectively improve the efficiency and accuracy of measurement. CCD combines with the 2-D micro-adjustment completes the function of precise positioning. Modular circuits make the signal integrity and accurate. LABVIEW software completes the function of controlling the system automatically, data acquisition and error correction. The experiments show that the scope of the whole system can be from Φ2.4mm to Φ7mm, the holes depth can be more than 130mm, the maximum resolution can be up to 0.5um, the highest precision can be up to 5um and linearity can be achieved 0.6018％. So the system can achieve nanometer measuring tests requirements.
Capacitance sensor Non-contact measurement Data acquisition Error correction Nano-metrology
Li Hongmin Ling Qingping
School of information & Electrical Engineering, Shandong Jianzhu University, Shandong 250101, China State Key Lab.of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072,
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
2715-2720
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）