A high-precision photoelectric autocollimator based on PSD
According to the present situation that the accuracy of most autocollimator measurement is not high enough, and the measurement is limited to one-dimensional static style, we design a kind of high-precision photoelectric self-collimation measurement system based on position sensitive detector (PSD). In this system we use a return-type optical path to reduce equipment size, and neural network for the non-linear correction of PSD. When the distance is 10m, it can achieve the measurement range ± 5, full-range measurement error of less than 0.2, measurement resolution of less than 0.01 and other technical indexes.
Autocollimator PSD Catadioptric optical path Neural network
Xiang Yang Zhang Xinting
Changchun University of Science and Technology, Changchun, Jilin,130022
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
2758-2761
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）