Micro polymer micro-blazed grating fabricated by HEL and its application on sensing methane concentration
For methane detection, PMMA (polymethyl methacrylate) micro-blazed grating is applied to split light from infrared LED and produce light with narrow bandwidth whose center wavelength just coincides with the absorption wavelength 1.331 μm of the methane. The PMMA grating is fabricated by HEL (Hot embossing lithography) and then deposited with a thin film of Pt for improving reflection properties. Nanoimprint Lithography (NIL) is a new technique to mass replicate nanostructure by molding, and the micro-blazed grating fabricated by this process may keep geometrical feature of the mode well. A setup was designed to verify light split properties of the grating. Results indicate HEL can give good fidelity of the PMMA micro-blazed grating, and the setup can output 1.331 μm with extremely narrow bandwidth as well. The work may not only been applied to sense concentration of methane, but also can be extend to other gas sensors.
Methane gas detection light-splitting HEL
Hairong Wang Xianni Gao Guoliang Sun Di Cen Zhuangde Jiang
State Key Laboratory for Manufacturing Systems Engineering, Xian Shaanxi 710049, China State key la State Key Laboratory for Manufacturing Systems Engineering, Xian Shaanxi 710049, China
国际会议
第八届国际测试技术研讨会(8th International Symposium on Test and Measurement)
重庆
英文
2957-2960
2009-08-01（万方平台首次上网日期，不代表论文的发表时间）