Stress in Diamond Coatings on Cutting Tools Deposited by Hollow Substrate Holder

摘要：

Chemical vapor deposition (CVD) diamond coatings were deposited on milling cutter substrate using a hollow substrate holder. The substrate is WC–Co cemented carbide contained 6％ of cobalt concentration. Structures and stress state of diamond films were analyzed by scanning electron microscopy (SEM) and Raman spectroscopy. It was found that the diamond coating is of the same quality at the same cutting tool deposited on a hollow substrate holder. Diamond (sp3) bonds are better developed with substrate temperature of ～760℃. A higher or lower substrate temperature could lead to a higher non-diamond carbon content in the films. A higher substrate temperature could lead to a higher thermal stress. The compressive stress increases when the substrate temperature is higher or lower than 760℃. The concentration of amorphous phase in the coatings is low with CH4 concentration of 1.0％ and 1.5％. A higher non-diamond carbon content and defects in the diamond coatings increase with the increase of CH4 concentration, which leads to the compressive stress value does not increase significantly under a high CH4 concentration.

关键词： CVD diamond coating Stress Hollow substrate

作者: Lu Wenzhuang Zuo Dunwen Xu Feng Yang Chun Wang Min

作者单位: College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics & Astronautics, N College of Mechanical and Electrical Engineering,Nanjing University of Aeronautics & Astronautics,Na

会议类型: 国际会议

会议名称: 第九届加工技术进展国际会议(9th International Conference on Progress of Machining Technology)

会议地点: 昆明

会议语种:英文

页码: 19-23

在线出版日期: 2009-04-25（万方平台首次上网日期，不代表论文的发表时间）