Figuring of Elliptical Neutron Focusing Mirror Using Numerically Controlled Local Wet Etching
Numerically controlled local wet etching is a novel figuring method for fabricating the ultraprecision optical components and/or finishing the functional materials. In this method, localized wet etching area is formed by applying the combination nozzle which consists of a supply part and a suction part of an etchant, and the removal volume at any point on the workpiece surface is determined by the dwelling time of the nozzle. In this paper, we proposed the two-step figuring process, which consists of a rough figuring process by applying a one-dimensional numerically controlled scanning using a large rectangular nozzle and a finishing process by applying two-dimensional numerically controlled scanning using a small circular nozzle, for figuring the plano-aspherical mirror. By applying the two-step figuring process, we fabricated the plano-elliptical neutron focusing mirror with the figure accuracy of less than 0.5 μm and succeeded in achieving the focusing gain of 6.
Aspherical mirror Elliptical mirror Local Wet Etching Etching Figuring Neutron optics Ultraprecision machining
Mikinori Nagano Hiroyuki Takai Kazuya Yamamura Dai Yamazaki Ryuji Maruyama Kazuhiko Soyama
Research Center for Ultra-precision Science and Technology, Osaka University, Yamadaoka 2-1, Suita, Research Center for Ultra-precision Science and Technology, Osaka University,Yamadaoka 2-1, Suita, O J-PARC Center, Japan Atomic Energy Agency, Tokai-mura, Ibaraki 319-1195, Japan
国际会议
第九届加工技术进展国际会议(9th International Conference on Progress of Machining Technology)
昆明
英文
376-379
2009-04-25（万方平台首次上网日期，不代表论文的发表时间）