Micro Machining of Three-dimensional Microstructure with the Tiny-grinding Wheel Based on the Electro-magneto-rheological Effect

摘要：

Using the tiny-grinding wheel based on the synergistic effect of the electro-magneto- rheological (EMR) fluid, a novel method is presented to machine the three-dimensional (3D) microstructure of hard-brittle materials. Machining experiments of micro-groove were conducted to reveal the machining performances of the tiny-grinding wheel. Experimental results confirm the effectiveness and feasibility of the micro machining technique with the EMR effect-based tiny-grinding wheel. The shape of machined micro groove is found to be an inverted trapezoid, and the material removal mode of normal glass with the micro machining method is the plastic-removal mode. With the increase of the rotation speed of the tool, the material removal rate, width and depth of micro grooves increased first and decreased afterwards. The maximum removal rate, width and depth of micro groove occur at different speeds of the tool.

关键词： Electro-magneto-rheological effect Microstructure Tiny-grinding wheel Material removal

作者: LIU Yi YAN Qiusheng LU Jiabin GAO Weiqiang YANG Yong

作者单位: Faculty of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, Chi Faculty of Electromechanical Engineering, Guangdong University of Technology, Guangzhou,510006, Chin

会议类型: 国际会议

会议名称: 第九届加工技术进展国际会议(9th International Conference on Progress of Machining Technology)

会议地点: 昆明

会议语种:英文

页码: 363-367

在线出版日期: 2009-04-25（万方平台首次上网日期，不代表论文的发表时间）