Development of Novel XY Micropositioning Stage

摘要：

Along with the rapid development of semiconductor, photonics and ultra-precision engineering, ultra-precision positioning stages are becoming more necessary than ever. In this study, one novel XY micropositioning stage is proposed, in which bi-axis circular notch flexure and cantilever hinge mechanism are optimal designed as bearing to provide smooth and guided motion. The theoretical stiffness of stage is provided and verified by FEM analysis. Finally, the micro-positioning stage is built and its resolution is experimentally validated to be less than 4nm.

关键词： Micropositioning stage PZT Flezure hinge 2-DOF

作者: CHEN Huawei JIANG Dehuai Ichiro HAGIWARA

作者单位: School of Mechanical Engineering and Automation, Beihang University, Beijing, China Tokyo Institute of Technology, Tokyo, Japan

会议类型: 国际会议

会议名称: 第九届加工技术进展国际会议(9th International Conference on Progress of Machining Technology)

会议地点: 昆明

会议语种:英文

页码: 103-106

在线出版日期: 2009-04-25（万方平台首次上网日期，不代表论文的发表时间）