Novel Precision PZT-driven Micropositioning Stage with Large Travel Range
One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.
PZT Micropositioning stage Large travel range Stick-slip model
Huawei CHEN Ichiro HAGIWARA
School of Mechanical Engineering and Automation, Beihang University,Beijing, China Tokyo Institute of Technology, Tokyo, Japan
国际会议
第九届加工技术进展国际会议(9th International Conference on Progress of Machining Technology)
昆明
英文
159-162
2009-04-25（万方平台首次上网日期，不代表论文的发表时间）