Micro Mechanical Property Measurement of Nickel (99.9%) Thin Film Using Vision Strain Measuring Method
Mechanical properties of micro-electro-mechanical systems (MEMS) materials are increasingly important with the wide use of miniaturized systems. This paper deals with development of the strain measurement module for micro materials tests. Vision strain method (VSM) and actuating stroke method (ASM) are adopted in the strain measurement module in order to reduce the discrepancies between the measured deformation and actual one in the specimen. With the developed strain measurement system, a number of tensile tests were concluded for 99.9% nickel thin films with the thickness of 500μm. Specimens with various widths from 1 mm to 2mm and with various lengths from 2mm to 4mm were used in the tests. From the experiment, material properties such as yieldstrength, tensile strength, fracture strength, fracture strain and youngs modulus are analyzed with stress-strain curves of 99.9% nickel thin film.
Nickel (99.9 ) Thin Film Materials MEMS Eco-energy Components Micro Mechanical Property Measurement Vision Strain Measuring Method Size Effect Micro
A.R.Han H.J.Lee N.K.Lee G.A.Lee J.H.Song
Manufacturing Convergence R&D Department, Fusion R&D Division,Korea Institute of Industrial Technology, Korea 1271-18 Sa 1-dong, Sangrok-gu, Ansan-si, Gyeonggi-do, 426-171 Korea
国际会议
10th International Symposium on Eco-Materials Processing and Design(第10届国际生态材料加工与设计研讨会)
西安
英文
69-72
2009-01-13（万方平台首次上网日期，不代表论文的发表时间）