Electrical Property Characterization of Plasma Sprayed Polycrystalline Silicon
Silicon-based materials have been widely applied in industrial fields, such as microelectronic and solar power, for the specific electronic properties. In the present work, free-standing thick silicon coatings were fabricated by air plasma spraying (APS) and vacuum plasma spraying (VPS) technologies. The microstructure and electrical property of the coatings were characterized. It was found that the electrical resistance of APS-Si coating was higher than that of VPS-Si coating. The impedance spectroscopy results showed there was significant difference in impedance curves of APS-Si and VPS-Si coatings. The grain boundary semicircle appeared in the plot of VPS-Si coating, while did not appeared in that of APS-Si coating. It was thought that the electrical property difference of the two kind coatings was related with the oxidation and microstructure difference of the coatings.
plasma spraying silicon coating electrical property microstructure
Yaran Ni Xuanyong Liu Yi Zeng Xuebin Zheng Heng Ji Chuanxian Ding
Key Laboratory of Inorganic Coating Materials, Chinese Academy of Sciences, 1295 Dingxi Road, Shangh Shanghai Institute of Ceramics, Chinese Academy of Sciences, 1295 Dingxi Road, Shanghai 200050, Chin
国际会议
10th International Symposium on Eco-Materials Processing and Design(第10届国际生态材料加工与设计研讨会)
西安
英文
303-306
2009-01-13（万方平台首次上网日期，不代表论文的发表时间）