Optical Electrostatic MEMS for Wavelength Switching

摘要：

An electrostatic micromirror is designed and fabricated using a standard MicroElectroMechanical Systems (MEMS) process. Active control approaches are proposed for driving actuation to eliminate micromirror pull-in achieving enhanced device performance and functionality.

作者: Yuan Ma

作者单位: Electrical and Computer Engineering Department, Dalhousie University, Halifax, NS, B3J 2X4, CANADA

会议类型: 国际会议

会议名称: 2008亚洲光纤通讯与光电博览会暨国际会议(Asia Optical Fiber Communication & Optoelectronic Ezposition & Conference)

会议地点: 上海

会议语种:英文

页码: 1-3

在线出版日期: 2008-10-30（万方平台首次上网日期，不代表论文的发表时间）