Finite Element Analysis of MEMS Based Fabry-Perot Optical Filter with Electrostatic Actuation

摘要：

Mechanical properties and tuning ability of MEMS based Fabry-Perot optical filter with electrostatic actuation are investigated. The simulation results demonstrate that the fringing field influence should be taken into account in structure design and modeling.

作者: Lei Wei Xuyuan Chen

作者单位: DTU Fotonik, Department of Photonics Engineering, Technical University of Denmark, DK-2800 Lyngby, D IMST, Vestfold University College, Raveien 197 Horten, 3103 Tonsberg, Norway SAH MEMS Research Cente

会议类型: 国际会议

会议名称: 2008亚洲光纤通讯与光电博览会暨国际会议(Asia Optical Fiber Communication & Optoelectronic Ezposition & Conference)

会议地点: 上海

会议语种:英文

页码: 1-3

在线出版日期: 2008-10-30（万方平台首次上网日期，不代表论文的发表时间）