Electrostatic Discharge (ESD) and Technology Scaling:The Future of ESD Protection in Advanced Technology

摘要：

In this paper,electrostatic discharge (ESD) protection in advanced technologies is discussed. The dilemma of ESD protection in advanced technologies and whether we will maintain the need,and desire to provide ESD protection in the future will be reviewed. This issue will influence the direction of the field of ESD protection and the ESD Technology Roadmap. The paper will also focus on what will be the ESD devices used in future 45 nm and 32 nm technologies.What will be the customer expectation,and what will be the ability to continue to achieve these objectives in the future?

作者: Steven H.Voldman

作者单位: Vermont,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 325-328

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）