Integration of carbon nanotubes in microelectronics

摘要：

Practical aspects of synthesis and applications of single-wall and multi-wall carbon nanotubes (SWNT and MWNT,respectively) are presented. Among numerous potential applications,utilization of nanotubes for interconnections in microelectronics and in gas sensors is considered in more detail. The issues related to compatibility of nanotubes synthesis and manipulation processes with the S1 planar technology are analysed.

作者: Jacobus Swart Stanislav Moshkalev

作者单位: Research Center CenPRA,Campinas,13069-901,Brazil Center for Semiconductor Components,UNICAMP,Campinas,13083-870,SP,Brazil

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 584-587

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）