Ozidized Layer of CdZnTe Studied by C-V Characteristics

摘要：

In this paper,the CZT oxidized layers on cadmium zinc telluride (CZT) wafer formed by two-step chemical passivation process (KOH-KC1+NH4F/H2O2) were investigated by using XRD,ED-XRF,SEM. The results show that the oxidized layer obtained by using this process has a very uniform and compact morphology and consists mainly of TeO2,TeO3 and CdTeO3. In particular,the thickness of the oxidized layer on the CZT was obtained by using C-V measurements for the first time. The dependence of the thickness of the oxidized layer on the passivation time was obtained and the main factors influencing the results of the C-V measurements were also discussed.

作者: Jian-rong Fan Wen-bin Sang Yue Lu Jia-hua Min Xiao-yan Liang Dong-ni Hu

作者单位: School of Material Science and Engineering,Shanghai University,Yanchang Road No.149,Shanghai 200072,P.R.China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 753-756

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）