Characteristics of a Highly Scalable Bridge Phase Change Memory

摘要：

Recent advances of a highly scalable bridge phase change memory cell are presented. To fabricate and characterize highly scaled devices,designs in both the process procedure and the testing algorism are considered extensively. We also compare the characteristics of the devices made from different types of materials. The experimental data reveal the superior scaling properties of the bridge phase change memory in different materials.

作者: Yi-Chou Chen Yuyu Lin Shih-Hung Chen Huai-Yu Cheng Hsiang-Lan Lung Simone Raoux Charles T.Rettner Geoffrey W.Burr Chung H.Lam

作者单位: IBM/Macronix Phase Change Memory Joint Project Macronix International Co.,Ltd.No.16 Li-Hsin Rd.Scien IBM Almaden Research Center,650 Harry Road,San Jose,CA 95120,USA IBM T.J.Watson Research Center,1101 Kitchawan Road,Yorktown Heights,NY,10598,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 909-912

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）