SG-TFS: a Versatile Embedded Flash with Silicon Nanocrystals as the Storage Medium

摘要：

Since Tiwari introduced the nanocrystal memory concept in 1996 1,much progress has been made in the areas of nanocrystal deposition,storage stack engineering,process integration,cell design,and array architecture. This paper describes the highly versatile flash technology,SG-TFS,in terms of its applicability from low-end to high-end,from code storage to data storage,and from consumer to automotive market segments. SG-TFS stands for Split-Gate Thin Film Storage and is built with silicon nanocrystals as its storage medium (Figure 1). Superior performance and reliability are demonstrated with a 90nm 16Mbit memory array.

作者: Ko-Min Chang

作者单位: Silicon Technology Solutions,Freescale Semiconductor,Inc.,Austin,Texas,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 943-946

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）