Flezible Plastic Single-Crystal Si CMOS (Invited)

摘要：

In this paper,the materials,processing and device characteristics of flexible Si CMOS on plastic substrates are reviewed. The methods to create transferable single-crystal Si nanomembranes are described first followed by the description of doping and transfer techniques developed for the nanomembranes. The preliminary device characteristics of CMOS and inverters on plastic substrates are presented.

作者: Zhenqiang Ma Hao-Chih Yuan George K.Celled

作者单位: Department of Electrical and Computer Engineering,University of Wisconsin-Madison 1415 Engineering D Soitec USA,2 Centennial Drive,Peabody,MA 01960,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 1009-1012

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）