A ±15V Interface IC for Capacitive Accelerometer
In this study,an interface IC for capacitive accelerometer sensor was designed,was processed in 6um standard bipolar process,and the IC operates in the supply voltage ranges ±6V-±18V The IC consists of an active square wave generator,a symmetrical voltage reference,a low-capacitance high-impedance voltage buffer,demodulation block,pre-amplifier,self-testing module,etc. It can form a complete self-testable one-dimensional accelerometer together with a MEMS differential capacitive acceleration sensor,without any other active devices. At a supply voltage of ±15V,the tested results are as follows. The scale factor is 60mV/g,low-frequency noise is 26 mgms,30-min zero drift is 54 ing,zero temperature drift in the range -40℃ to 60℃ is -13 mg/℃,response frequency reaches 2 kHz,and total power consumption is 48mW only.
Wengang Huang Zhengrong He Luncai Liu Yingjun Zhong Kaicheng Li Wei Wu
National Labs of Analog IC,14 Hayuan Rd,Nanping,Chongqing 400060,China SISC,14 Huayuan Rd,Nanping,Ch SISC,14 Huayuan Rd,Nanping,Chongqing 400060,China National Labs of Analog IC,14 Huayuan Rd,Nanping,Chongqing 400060,China SISC,14 Huayuan Rd,Nanping,C
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
1761-1764
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）