Current MEMS Technology and MEMS Sensors-Focusing on Inertial Sensors

摘要：

In this paper,current Micro Electro Mechanical Systems (MEMS) technology and some inertial sensors will be discussed.MEMS technology is presently becoming a key technology for future microelectronics. Some remarkable developments in MEMS are the driving force behind the current MEMS field,and many MEMS devices in the market are using these technologies effectively. Some particularly remarkable MEMS technologies and devices are described in this paper.

作者: Kazusuke Maenaka

作者单位: Graduate School of Engineering,University of Hyogo Himeji,Hyogo 671-2280,Japan

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2371-2374

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）