Fabrication of Novel Cantilever with Nanotip for AFM Applications
As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM),we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever,with 1.2μm height,have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe,it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.
Spacer technology Cantilever Atomic force microscopy High-aspect-ratio Nanotip
Li Li Xiang Han Wengang Wu Fei Ding Qtnghua Chen
Institute of Microelectronics,Peking University,Beijing 100871,P.R.China National Key Laboratory of Micro/Nano Fabrication Technology
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
2383-2386
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）