Smart Temperature Sensor with Quartz Tuning Fork Resonators
This paper discusses a smart temperature sensor system that comprises of a high performance quartz tuning fork temperature sensor,interface with CMOS circuitry and eontrol algorithm for reconfiguration. The ideal thermo-sensitive cut for quartz tuning fork resonators is analyzed with the theory. The specific cut quartz tuning fork was fabricated using photolithography and the etching technology. And the tuning fork sensing element (4×1×0.2 mm3) is so small that can be housed in the capsule (Φ2×6mm). The smart temperature sensor along with the interface IC to FPGA and special control algorithm may easily realize the sensor reconfiguration and the auto-calibration in the field. The experimental result indicates that the sensitivity of this sensor can reach 65ppm/℃in the temperature range from-20 to 140℃,it guarantees that precision is 0.01℃,the resolution is 0.001℃,and the response time is ls.
Jun Xu Bo You Lei Ma Jing Ma Xin Li
College of Automation,Harbin University of Science and Technology,Harbin 150080,P.R.China Computer Center,Harbin University of Science and Technology,Harbin 150080,P.R.China
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
2391-2394
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）