PMOS RING OSCILLATING DIGITAL PRESSURE SENSOR MANUFACTURED BY MEMS PROCESS

摘要：

A new digital pressure-sensing device is presented. It employs the Micro-ElectroMechanical Systems (MEMS) technologies to form pressure sensing using PMOS ring oscillators to generate frequency which depends on the pressure-induced stress. The digital pressure sensor has several advantages. One of them is to convert the analog measurement of pressures into the frequency measurement. Compared to a direct pressure measurement,it is much more convenient and easier to conduct the frequency measurement with digital circuits. Since the ring resonators are exposed to the change of the pressure,the structure is significantly simplified as no shielding protections of the sensor from the pressure are required.

作者: James Y.Yang Zhiping Yu Litian Liu

作者单位: Institute of Microelectronics,Tsinghua University,Beijing 100084,P.R.China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2436-2439

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）