Study on the Quadrature Error under Varying Ambient Pressure for a Bulk Micromachined Z-azis Gyroscope

摘要：

This paper focused on the study of the quadrature error for a bulk micromachined gyroscope under varying pressure conditions between 150Pa and 100kPa. The source of the quadrature error and the non-ideal model of the micromachined gyroscope are presented with details. The change trend and characterization of pressure dependence were analyzed both analytically and experimentally in the custom-built installation. The results indicated that in order to meet high resolution and stabilization of the quadrature error,the optimal working pressure applied to the gyroscope must limit to a certain boundary condition. At last,some effective methods of restraining the quadrature error were put forward.

关键词： micromachined gyroscope quadratureerror pressure vacuum sealed

作者: Jian Cui Longtao Lin Zhongyang Guo Xiaozhu Chi Qiancheng Zhao Zhenchuan Yang Guizhen Yan

作者单位: Institute of Microelectronics,Peking University,Beijing 100871,P.R.China National Key Laboratory of Micro/Nano Fabrication Technology

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2440-2443

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）