Monolithic Integration of Bulk micro-machined Capacitive Accelerometer and Signal Conditioning Circuit

摘要：

This paper presents a bulk micro-machined single axis accelerometer with analog signal conditioning circuit on a single chip. Design advantages include combining electrical isolation structures and mechanical connection structures with insulating materials refilled trenches to increase transducer sensitivity by minimizing parasitic capacitance,and lower package cost due to post-CMOS process. Several easy-tune techniques have been used to decrease the offset and increase the output signal amplitude.

作者: Liang Qian Jia Wang Zhengchuan Yang Guizhen Yan

作者单位: Institute of Microelectronics,Peking University,Beijing 100871,P.R.China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2444-2447

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）