Design of Monolithic BiCMOS Open-loop Detection Circuit for MEMS Capacitance Accelerometer

摘要：

A novel monolithic BiCMOS open-loop detection circuit for capacitive MEMS accelerometers was presented. It has been developed in 2μm CMOS process. The tested results were as follows. Noise was 1mg/(Hz),power was smaller than l0mW,supply voltage was as low as 5V,and there is a 2-pole filter on chip.

关键词： capacitance accelerometer open-loop detection circuit BiCMOS

作者: Yuesheng Wang ShiliuXu Luncai Liu Kaicheng Li

作者单位: College of Opto-Electronic Engineering,Chongqing University,Chongqing 400044,P.R.China National Labs National Labs of Analog Integrated Circuit Sichuan Institute of Solid-State Circuits,China Electroni

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2448-2451

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）