The Future of MEMS in Energy Technologies

摘要：

The 21st century requires innovative solutions to meet the ever increasing demand for ultra portable and highly efficient energy technologies. Micro-electro-mechanical Systems (MEMS) have shown significant promise in providing robust,low-cost transduction capabilities. MEMS sensors and actuators are ideally suited for small-scale energy harvesting and power generation applications where overall device dimensions are critical. Furthermore,MEMS technology can also be harnessed for large scale energy applications by augmenting these systems with sensing and actuation capabilities in order to improve energy efficiency and reduce costs. This paper highlights some current MEMS research for energy applications and also explores some areas of the energy industry which might benefit from integration with MEMS.

作者: Norman C.Tien Andojo Ongkodjojo Robert C.Roberts Dachao Li

作者单位: Department of Electrical Engineering and Computer Science,Case Western Reserve University,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2452-2455

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）