Integrated CMOS-MEMS Technology and Its Applications

摘要：

The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semiconductor-microelectromechanical systems (CMOSMEMS). The prospect of this integration is also presented. AMEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion,it is confirmed that the integrated CMOS-MEMS technology will pave the way for the More than Moore technology.

作者: Hiroki Morimura Shinichiro Mutoh Hiromu Ishii Katsuyuki Machida

作者单位: NTT Microsystem Integration Laboratories,Kanagawa 243-0198,Japan NTT Advanced Technology Corporation,Kanagawa 243-0198,Japan

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2460-2463

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）