Detection of Stiction of Suspending Structures in MEMS by A Laser Doppler Vibrometer Systems
Stiction as one of the most failures both in MEMS fabrication and operation has been widely studied. With the decrease in the dimension and material,the ubiquitous surface effect between the device and substrate has become more and more effective. Surface-micromachined structures formed by the wet etching of sacrificial layers are commonly plagued by problems of sticking to the substrate. This paper presents a useful diagnosis system for fully detecting and characterizing the stiction failure occurring in MEMS. The system consists of an LDV (Laser Doppler Vibrometer),a chamber with controllable environment such as pressure and temperature,and a diagnosis program developed by Matlab software. Full knowledge about the stiction,including its position,shape,stiction releasing configuration and probability of re-stiction can be accessed using the system. We also present an experimental way to analyze two important forces of the surface effect: the capillary force and the van der Waals force. The experimental diagnosis methodology and theoretical summary could provide a useful reference for detecting and predicting the stiction failure of micro-structures.
Laser Doppler Vibrometer stiction surface force
Jun-Wen Liu Qing-An Huang Jing Song Jie-Ying Tang
Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing,210096,P.R.China
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
2472-2475
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）