Al/Au Composite Membrane Bridge DC-Contact Series RF MEMS Switch

摘要：

A novel DC-contact series RF MEMS switch using Al/Au composite membrane bridge is present. The warping problem of cantilever beam under residual stress is avoided by introduction of the slanting beam. Au-Au direct contact is achieved by using Al/Au composite membrane. The process is based on BorofloatTM glass substrate and resistance is used to isolate the crosstalk between the RF signal and DC driven voltage. The pull-down voltage is about 40 V; the contact resistance is 1.15 ?2. The insertion loss is -0.22 dB at 5 GHz,-0.29 dB at 12 GHz,and in the frequency range from DC to 40 GHz,the insertion loss is less than -0.9 dB; the isolation is -28 dB at 5 GHz and -20 dB at 12 GHz. The designed RF MEMS switch is suitable for the application of frequency range from DC to X band.

作者: Zhihao Hou Zewen Liu Zhijian Li

作者单位: Institute of Microelectronics,Tsinghua University,Beijing 100084,P.R.China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2488-2491

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）