Surface Micromachined Cantilever Arrays for Infrared Imaging

摘要：

This paper presents the design,fabrication and performance of a bimaterial microcantilever focal plane array (FPA) of 256×256 pixels for uncooled infrared (IR) imaging. The microcantilevers made of silicon nitride (SiNx) and gold (Au) convert incident IR energy to a distribution of deflection angles among the FPA pixels according to the IR source,which is read out by an optical method. The thermo-mechanical sensitivity of the cantilever pixel was measured to be 147nm/K. The noise equivalent temperature difference (NETD) of the FPA was theoretically estimated to be 130mK and the response time was calculated to be 12ms. Thermal image of the heated brand iron were captured by the fabricated FPA. The most valuable feature of the implemented FPA is their scalability to high resolution formats without progressively growing fabrication complexity and cost.

作者: Yuliang Yi Xiaomei Yu Ming Liu Xiaohua Liu Yuejin Zhao

作者单位: Institute of Microelectronics,Peking University,Beijing 100871,China Department of Photo-Electronic Engineering,Beijing Institute of Technology,Beijing,100081,China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2496-2499

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）