A 10-14 GHz RF MEMS Tunable Bandpass Filter
This paper reports a bulk micromachined microwave tunable bandpass filter whose tunability is accomplished by MEMS bridges. This kind of tunable bandpass filter is based on elliptic function lowpass prototype filters. The proposed filter is constructed by the combination of a tunable lowpass filter and a highpass one which can either be tunable or not. In this way,the tunable bandpass filter can change its higher band cutoff frequency by shifting the cut off frequency of the lowpass filter. The tunable lowpass filter is realized by adjusting the first transmission zero (FTZ),while the tunable bandpass filter,if it is realizable,is achieved by adjusting the last transmission zero (LTZ). The method of shifting the transmission zero of the elliptic filter is to load capacitive MEMS switches at the end of the branch where the particular transmission zero lies in. Experiments show that the simulated 3dB cutoff frequency changes about 600MHz after one more MEMS switch is activated.
RF MEMS elliptic lowpass filter tunable filter FTZ
Liwei Zhao Mm Miao Jingpeng Bu Yufeng Jin
National Key Laboraty of Micro/Nano Fabrication Technology,Peking University,Beijing 100871,P.R.Chin Insti.of Information Microsystem,Beijing Information Science and Technology Univ.,Beijing 100101,P.R National Key Laboraty of Micro/Nano Fabrication Technology,Peking University,Beijing 100871,P.R.Chin
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
2516-2519
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）