Microwave Frequency Detector based on MEMS Technology

摘要：

This paper presents the design,fabricatioa and measurement of a MEMS microwave frequency detector for the first time. The structure integrated on GaAs substrate using MMIC process consists of a microwave power divider,a microwave power combiner,two CPW transmission lines,a MEMS capacitor power sensor and a thermopile. The detector has been designed and fabricated in X band successfully. The sensitivity is 2.86 GHz pF-1 from 19dBm to 23 dBm by the capacitor,and 0.031 GHz μV-1 from l0dBm to 20 dBm by the thermopile,respectively.

作者: Jun Zhang Xiaoping Liao Yongchang Jiao

作者单位: Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2520-2523

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）