Large-Range Large-Aperture MEMS Micromirrors for Biomedical Imaging Applications

摘要：

Micromirrors with large scan ranges,large aperture sizes,fast speeds,low voltages and low cost are needed for optical switching,displays and biomedical imaging,but it is very challenging to simultaneously meet all the requirements. This paper introduces electrothermal bimorph based micromirrors that can overcome the challenge. For example,a large-vertical-displacement (LVD) micromirror scans 0.7mm vertically at less than 25Vdc. A lateral-shift-free (LSF) LVD generates a piston motion of 0.6mm and scans more than 30° about two axes at less than 8Vdc. An inverted-series-connected (ISC) micromirror scans ±30° about two axes with no rotation axis shifts. All these mirrors have an optical aperture of 1 mm. Their resonant frequencies range from 300Hz to 2kHz. Some of these micromirrors have been applied in biomedical imaging applications.

作者: Huikai Xie

作者单位: Department of Electrical and Computer Engineering,University of Florida,USA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2549-2552

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）