Merging SoC and LOC Together

摘要：

A promising combination of the semiconductor integrated System-on-a-Chip (SoC) with the Lab-on-a-Chip (LOC) is brought in this paper. In this paper,we propose a new technology which enables monolithic integration of the self-assembled biological system,the MEMS structure,the microfluidic system,and CMOS electronic circuits together. Utilizing this approach,more functionality is introduced into the SoC,while the LOC becomes more intelligent and controllable. A Post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.

作者: Zhihong Li Xu Ji Lu Wang Jianzhong Xi

作者单位: National Key Laboratory of Nano/Micro Fabrication Technology,Institute of Microelectronics,Peking Un Biomedical Engineering Center,College of Engineering,Peking University,Beijing,100871,CHINA

会议类型: 国际会议

会议名称: 9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)

会议地点: 北京

会议语种:英文

页码: 2553-2556

在线出版日期: 2008-10-20（万方平台首次上网日期，不代表论文的发表时间）