A surface plasmon resonance (SPR) sensor chip integrating prism array based on polymer microfabrication
The prototype of a prism-coupled Kretschmann surface plasmon resonance (SPR) chip was fabricated by suing bulk silicon micromachining and polymer replication,and the chip is constructed with the polymer-prism array,metal layer and micro-channel. The performance of PDMS SPR chip was investigated at different incident wavelengths,when the chip is applied to test samples,including air,water and ethanol. As the light source was at 650nm the resonance angles in air,water and ethanol were about 48.14°,76.6° and 77.1°,respectively. Resonance angles decrease almost in linearity with refractive index of PDMS increasing. The obtained SPR angles are approximately consistent with the theoretical ones. This polymer micro-prism array-coupled SPR chip continues to evolve as an elegant and powerful analytical method with unique capabilities in biosensors.
Zhao-xin Geng Xu Ji Xia Lou Qing Li Wei Wang Zhi-hong Li
National Key Laboratory of Nano/Micro Fabrication Technology,Institute of Microelectronics,Peking Un National Key Laboratory of Nano/Micro Fabrication Technology,Institute of Microelectronics,Peking Un School of Sciences,Changchun University of Science and Technology,Changchun,130000,P.R China
国际会议
9th International Conference on Solid-State and Integrated-Circuit Technology(第9届固态和集成电路国际会议)
北京
英文
2561-2564
2008-10-20（万方平台首次上网日期，不代表论文的发表时间）