Doped monolithic langasite structures for high temperature MEMS
Doping of langasite is performed in order to create monolithic structure components such as electrodes. In order to control the process, the diffusion coefficients of praseodymium, strontium and niobium are determined. An increase of the doping depth by application of an electric field is demonstrated. Strontium doped areas exhibit an increased conductivity by about 4 orders of magnitude. A langasite bulk acoustic wave resonator with Sr-doped areas as monolithic electrodes is operated up to 800℃. For demonstration of the functionality and quality of langasite microstructures at elevated temperatures, planar and biconvex langasite membranes are prepared and characterized.
Langasite MEMS Local doping High temperature
Jan Sauerwald Denny Richter Erik Ansorge Bertram Schmidt Holger Fritze
Clausthal University of Technology, Germany Otto-von-Guericke-University Magdeburg, Germany
国际会议
The 16th International Conference on Solid State Ionics(第十六届国际固态离子学会议)
上海
英文
928-931
2007-07-01（万方平台首次上网日期，不代表论文的发表时间）