Effects of methane concentration on diamond spherical shell films prepared by DC-plasma jet CVD
(0) Diamond spherical shell films with different methane concentrations were deposited by DC plasma jet CVD method. The morphology, impurities, internal fiber texture and surface roughness of diamond film were investigated by scanning electron microscopy, Raman spectroscopy, X-ray diffraction and roughness profile meter respectively. The results show that, at the beginning of diamond nucleation, diamond crystallites orientation was random, and influence of CH4 concentration was negligible. At a low CH4 concentration (1%) and the substrate temperature of 850℃, high quality diamond film was prepared. The film structure was polycrystalline and (111) face was dominant. When CH4 concentration was increased, diamond film has more local clusters, amorphous graphite. Thus, higher CH4 concentration has negative influence on preparing high quality diamond film.
DC-plasma CVD Diamond spherical shell film Methane concentration
Duosheng Li Dunwen Zuo Wenzhuang Lu Rongfa Chen Bingkun Xiang Min Wang
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics
国际会议
The 16th International Conference on Solid State Ionics(第十六届国际固态离子学会议)
上海
英文
1263-1267
2007-07-01（万方平台首次上网日期，不代表论文的发表时间）