Photochemical Formation of Silver Patterns by Using TiO2 Thin Film as the Functional layers

摘要：

A simple method for the formation of silver patterns on polyimide resin and polyethyleneterephthalate substrate was demonstrated by using sputtered TiO2 thin film as the functional layers. TiO2 thin film was deposited by DC reactive magnetron sputtering process. The photoinduced hydrophilic properties of TiO2 films were evaluated by the analyzing the change of the water contact angle during the film exposure to light irradiation. After irradiation by UV light, the contact angle vanished and the surface exhibited superhydrophilicity. Silver nanoparticle patterns were formed photochemically under the action of monochromatic (254 nm) and a photomask.

关键词： silver patterns photochemical formation DC reactive magnetron sputtering TiO2

作者: Xiaoli Cui Xiaoming Lu Jie Shen Zhuang jian Zhang

作者单位: Department of Materials Sciences,Fudan University Shanghai,200433,China Department of Materials Sciences,Fudan UniversityShanghai,200433,China

会议类型: 国际会议

会议名称: 第十一届世界电子电路大会

会议地点: 上海

会议语种:英文

在线出版日期: 2008-03-17（万方平台首次上网日期，不代表论文的发表时间）